|
To pursue research thrusts, a
series of state-of-the-art research equipment is available in the
Nanolab, including a Riber GS-MBE32 system, SVT MBD system, AIXTRON
MOCVD system, FEI FIB System, UNAXIS ICP System, Sputtering Deposition System, Thermal
Oxidation Furnace. Additional support
equipment to measure and characterize nanostructures/materials includes:
Surface Profilers; Scanning Electron and Atomic
Force Microscopes; Electronic Properties Test Station, Hall Effect,
Several Spectrometers, X-ray Diffraction. Applications of the
research carried out in the NanoLab are wide ranging, from novel GaN-based
semiconductor materials and rare earth based luminescent devices, to electronic and
photonic SiC devices, to wide bandgap materials.
|