Molecular Beam Deposition

Molecular beam deposition (MBD) in NanoLab is a deposition machine manufactured by SVT Associates for thin film growth. Unlike the Riber system, MBD is not operated at ultra high vacuum.  This allows a faster turn around time between growths and vacuum breaks.  Additional features of MBD include the capacity to grow one four inch wafer or three  two inch wafers, an 800 degreeC growth heater, a 1200 watt RF power supply for nitrogen plasma, a crystal monitor, six potential cell ports, and a load lock with a three cassette loader.  MBD is being used to grow highly uniform GaN:RE thin films phosphors.

A view of the whole system (Top)

A close view of the chamber (Bottom)