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The molecular beam deposition (MBD) system, manufactured by SVT Associates, is used for thin film growth. Unlike the Riber system, MBD is not operated at ultra high vacuum. This allows a faster turn-around time between growths and vacuum breaks. Additional features of MBD include the capacity to grow one four inch wafer or three two inch wafers, an 800 degreeC growth heater, a crystal thickness monitor, 8 material cells, and a load lock with a three cassette loader. MBD is currently being used to grow OLEDs and biOLEDS, containing DNA.
A view of the whole system (Top) A close view of the chamber (Bottom)
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