Molecular Beam Deposition
The molecular beam deposition (MBD) system, manufactured by SVT Associates, is used for thin film growth. Unlike the Riber system, MBD is not operated at ultra high vacuum. This allows a faster turn-around time between growths and vacuum breaks. Additional features of MBD include the capacity to grow one four inch wafer or three two inch wafers, an 800 degreeC growth heater, a crystal thickness monitor, 8 material cells, and a load lock with a three cassette loader. MBD is currently being used to grow OLEDs and biOLEDS, containing DNA.
A view of the whole system (Top)
A close view of the chamber (Bottom)