Date from the new Physical Electronics 6600 Dynamic Secondary Ion Mass Spectrometer (D-SIMS) was gathered at the University of Cincinnati Nanoelectronics Laboratory on January 5,
2004, directly after installation of the system. This data was then compared to D-SIMS data gathered by Charles Evans West on May 24,
2001 on the exact same sample. The two graphs of the data are offered for comparison. We believe that the new system completely
reproduces the data of 2001 and that the materials and structure (GaN/Er/Si) are representative of the needs of the lab. This verifies the
utility of the system and concludes the evaluation.